WO3 sensor response according to operating temperature:: Experiment and modeling

被引：38

作者：

Bendahan, M. ^{[1
]}

Guerin, J. ^{[1
]}

Boulmani, R. ^{[1
]}

Aguir, K. ^{[1
]}

机构：

[1] Univ Aix Marseille 3, Fac Sci & Tech, Lab Mat & Microelect Provence, L2MP CNRS, F-13628 Aix En Provence, France

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2007年 / 124卷 / 01期

关键词：

WO3; gas sensor; modeling;

D O I：

10.1016/j.snb.2006.11.036

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

WO3-based sensors are realized in the aim to detect ozone. The thin film of WO3 is sputtered on a SiO2/Si substrate with Pt micro-electrodes. In a previous work, the sensor response dependence on processing parameters has been studied. Now operating temperature of the sensor is investigated and a theoretical model developed by our team confirms experimental measurements. The interaction between the gas and the surface was modeled by Langmuir isotherm and the electrical resistivity was evaluated by solving the transport equations. (c) 2006 Elsevier BX All rights reserved.

引用

页码：24 / 29

页数：6

共 16 条

[1]

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