Nanostructured superhard films as typical nanomaterials

被引：32

作者：

Andrievski, R. A. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Problems Chem Phys, Chernogolovka 142432, Moscow, Russia

来源：

SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 13期

基金：

俄罗斯基础研究基金会;

关键词：

nanomaterials; borides/nitrides; film deformation; magnetic field;

D O I：

10.1016/j.surfcoat.2006.08.119

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The advantages of the use of film samples for nanomaterials science studies are characterized. In particular, nanograined structures are readily obtained in film samples, whereas they are difficult to obtain in bulk samples. The properties of superhard multilayer nitride films, including the deformation of TiN and TiB2 films during indentation, the effect of an additional external magnetic field on the (TiB2-B4C) films' nanostructure and microhardness, as well as galvanomagnetic properties of TiN films are described and discussed in detail. It was found that generally the microhardness of multilayer nitride films increased with the number of layers, except if the two layers mutually dissolved. A microhardness of 78 GPa was achieved in 180 layer TiN/NbN films. TiB2 films had an inhomogencous step-like deformation pattern under indentation, in contrast to TiN films, which had a homogeneous deformation pattern, probably due to a slip along columnar grain boundaries. Application of an additional external magnetic field during magnetron sputter deposition increased hardness and smoothness of both crystalline and amorphous (TiB2-B4C) films. Decreasing the grain size of TiN films decreased the electron mobility while maintaining the carrier density. The oxygen and carbon distribution can be considered as random in TiN films with the grain size interval of 10-30 tim. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：6112 / 6116

页数：5

共 31 条

[21] Thermal stability of PVD hard coatings [J].

Mitterer, C ;

Mayrhofer, PH ;

Musil, J .

VACUUM, 2003, 71 (1-2) :279-284

[22] SPUTTER DEPOSITION OF ULTRAHARD COATINGS WITHIN THE SYSTEM TI-B-C-N [J].

MITTERER, C ;

RAUTER, M ;

RODHAMMER, P .

SURFACE & COATINGS TECHNOLOGY, 1990, 41 (03) :351-363

[23] Large-scale manufacturing of nanoscale multilayered hard coatings deposited by cathodic arc/unbalanced magnetron sputtering [J].

Münz, WD .

MRS BULLETIN, 2003, 28 (03) :173-179

[24] Nanocomposite hard coatings for wear protection [J].

Patscheider, J .

MRS BULLETIN, 2003, 28 (03) :180-183

[25]

SHINN M, 1992, J MATER RES, V7, P99

[26] Localized deformation of multicomponent thin films [J].

Shtansky, DV ;

Kulinich, SA ;

Levashov, EA ;

Sheveiko, AN ;

Kiriuhancev, FV ;

Moore, JJ .

THIN SOLID FILMS, 2002, 420 :330-337

[27] Different approaches to superhard coatings and nanocomposites [J].

Veprek, S ;

Veprek-Heijman, MGJ ;

Karvankova, P ;

Prochazka, J .

THIN SOLID FILMS, 2005, 476 (01) :1-29

[28]

Veprek S, 1999, J VAC SCI TECHNOL A, V17, P2401, DOI 10.1116/1.581977

[29] LARGE-AREA BORON-CARBIDE PROTECTIVE COATINGS FOR CONTROLLED THERMONUCLEAR RESEARCH PREPARED BY INSITU PLASMA CVD [J].

VEPREK, S .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1992, 12 (03) :219-235

[30] Super- and ultrahard nanacomposite coatings: generic concept for their preparation, properties and industrial applications [J].

Veprek, S ;

Jilek, M .

VACUUM, 2002, 67 (3-4) :443-449

← 1 2 3 4 →