Three-dimensional hydrogen microscopy in diamond

被引：100

作者：

Reichart, P

Datzmann, G

Hauptner, A

Hertenberger, R

Wild, C

Dollinger, G

机构：

[1] Tech Univ Munich, Phys Dept E12, D-85748 Garching, Germany

[2] Univ Munich, Dept Phys, D-85748 Garching, Germany

[3] Fraunhofer Inst Appl Solid State Phys, D-79108 Freiburg, Germany

来源：

SCIENCE | 2004年 / 306卷 / 5701期

关键词：

D O I：

10.1126/science.1102910

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

A microprobe of protons with an energy of 17 million electron volts is used to quantitatively image three-dimensional hydrogen distributions at a lateral resolution better than 1 micrometer with high sensitivity. Hydrogen images of a <110>-textured undoped potycrystalline diamond film show that most of the hydrogen is located at grain boundaries. The average amount of hydrogen atoms along the grain boundaries is (8.1 +/- 1.5) x 10(14) per square centimeter, corresponding to about a third of a monolayer. The hydrogen content within the grain is below the experimental sensitivity of 1.4 x 10(16) atoms per cubic centimeter (0.08 atomic parts per million). The data prove a low hydrogen content within chemical vapor deposition-grown diamond and the importance of hydrogen at grain boundaries, for example, with respect to electronic properties of polycrystalline diamond.

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页码：1537 / 1540

页数：4

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