High-power, long-lifetime InGaN/GaN/AlGaN-based laser diodes grown on pure GaN substrates

被引:259
作者
Nakamura, S [1 ]
Senoh, M [1 ]
Nagahama, S [1 ]
Iwasa, N [1 ]
Yamada, T [1 ]
Matsushita, T [1 ]
Kiyoku, H [1 ]
Sugimoto, Y [1 ]
Kozaki, T [1 ]
Umemoto, H [1 ]
Sano, M [1 ]
Chocho, K [1 ]
机构
[1] Nichia Chem Ind Ltd, Dept Res & Dev, Tokushima 774, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1998年 / 37卷 / 3B期
关键词
GaN; InGaN; dislocation; selective growth; laser; violet; lifetime; cleave;
D O I
10.1143/JJAP.37.L309
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxially laterally overgrown GaN on sapphire was used to reduce the number of threading dislocations originating from the interface of the GaN epilayer with the sapphire substrate. The GaN layer above the SiO2 mask area surrounding the window, corresponding to the lateral overgrowth, was nearly free of the threading dislocations. A high density of threading dislocations was observed in the vicinity of GaN grown in the window regions. InGaN multi-quantum-well-structure laser diodes (LDs) grown on pure GaN substrates, which were fabricated by removing the sapphire substrate, were demonstrated. The LDs with an output power of 5 mW exhibited a lifetime of more than 290 h and an estimated lifetime of 10,000 h despite a relatively large threshold current density. The far-field pattern of the LDs with a cleaved mirror facet revealed single-mode emission without any interference effects.
引用
收藏
页码:L309 / L312
页数:4
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