Low-porosity porous silicon nanostructures on monocrystalline silicon solar cells

被引:20
作者
Gonzalez-Diaz, B.
Guerrero-Lemus, R. [1 ]
Borchert, D.
Hernandez-Rodriguez, C.
Martinez-Duart, J. M.
机构
[1] Univ La Laguna, Dept Fis Basica, Tenerife 38204, Spain
[2] Fraunhofer Inst, Inst Solare Energiesyst, D-45884 Gelsenkirchen, Germany
[3] Univ Autonoma Madrid, Dept Fis Aplicada, E-28049 Madrid, Spain
关键词
solar cells; porous silicon; photoluminescence;
D O I
10.1016/j.physe.2006.12.042
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this work we present a study of low-porosity porous silicon (PS) nanostructures stain etched on monocrystalline silicon solar cells. The PS layers reduce the reflectance, improve the diffusion of dopants by rapid thermal processes, and increase the homogeneity of the sheet resistance. Some samples were subjected to chemical oxidation in HNO3 to reduce the porosity of the surface layer. After the diffusion process, deposition of a SiNx, antireflection layer, and screen printing of the samples, an efficiency of 15.5% is obtained for low-porosity PS solar cells, compared with an efficiency of 10.0% for standard PS cells and 14.9% for the reference Cz cells. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:215 / 218
页数:4
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