RF MEMS switches fabricated on microwave-laminate printed circuit boards

被引：30

作者：

Chang, HP ^{[1
]}

Qian, JY

Cetiner, BA

De Flaviis, F

Bachman, M

Li, GP

机构：

[1] Univ Calif Irvine, Dept Elect Engn & Comp Sci, Irvine, CA 92697 USA

[2] Univ Calif Irvine, Dept Elect & Comp Engn, Irvine, CA 92697 USA

[3] Univ Calif Irvine, Integrated Nanosyst Res Facil, Irvine, CA 92697 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2003年 / 24卷 / 04期

关键词：

compressive-molding planarization; high-density; inductively coupled plasma chemical vapor deposition (HDICP-CVD); printed circuit board (PCB); reconfigurable antennas; RF MEMS switches;

D O I：

10.1109/LED.2003.812150

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel fabrication process has been developed for directly constructing radio frequency microelectrical mechanical systems (RF MEMS) capacitive switches on microwave-laminate printed circuit boards (PCBs). The integrated process uses metal wet etching to form-the metal lines for coplanar waveguides, compressive molding planarization (COMP) to planarize uneven surface heights for switch membrane formation, and high-density, inductively coupled plasma chemical vapor deposition (HDICP-CVD) for low-temperature silicon nitride deposition. This technology promises the potential of further monolithic integration with antennas on the same PCBs to form reconfigurable antennas without the concerns of mismatching among components.

引用

页码：227 / 229

页数：3

共 26 条

[1]

Barker NS, 1998, IEEE T MICROW THEORY, V46, P1881, DOI 10.1109/22.734503

[2] Low-loss distributed MEMS phase shifter [J].

Borgioli, A ;

Liu, Y ;

Nagra, AS ;

York, RA .

IEEE MICROWAVE AND GUIDED WAVE LETTERS, 2000, 10 (01) :7-9

[3] RF-MEMS switches for reconfigurable integrated circuits [J].

Brown, ER .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1998, 46 (11) :1868-1880

[4] Monolithic integration of RF MEMS switches with a diversity antenna on PCB substrate [J].

Cetiner, BA ;

Qian, JY ;

Chang, HP ;

Bachman, M ;

Li, GP ;

De Flaviis, F .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2003, 51 (01) :332-335

[5]

CHANG CH, 2002, MTTS INT MICR S JUN

[6]

CHANG HP, 2002, P SPIE INT S SMART S

[7]

DEFLAVIIS F, 2000, P IEEE AP S INT S DA

[8]

Goldsmith CL, 1999, INT J RF MICROW C E, V9, P362, DOI 10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO

[9]

2-H

[10] Performance of low-loss RF MEMS capacitive switches [J].

Goldsmith, CL ;

Yao, ZM ;

Eshelman, S ;

Denniston, D .

IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1998, 8 (08) :269-271

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