Self-assembled 3-D silicon microscanners with self-assembled electrostatic drives

被引：28

作者：

Syms, RRA ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2BT, England

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2000年 / 12卷 / 11期

基金：

英国工程与自然科学研究理事会;

关键词：

MEMS; micromirror; microoptics; self-assembly;

D O I：

10.1109/68.887729

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

Three-dimensional, electrostatically driven resonant torsion mirror microscanners are constructed by surface tension powered out-of-plane rotation of parts formed in bonded silicon-on-insulator. Simultaneous self-assembly of the fixed electrodes using a below-substrate limiter mechanism allows scanning perpendicular to the assembly axis, and direct drive allows high-Q operation.

引用

页码：1519 / 1521

页数：3

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