Precise orientation of single crystals by a simple x-ray diffraction rocking curve method

被引:23
作者
Doucette, LD [1 ]
da Cunha, MP
Lad, RJ
机构
[1] Univ Maine, Surface Sci & Technol Lab, Orono, ME 04469 USA
[2] Univ Maine, Dept Phys & Astron, Orono, ME 04469 USA
[3] Univ Maine, Dept Elect & Comp Engn, Orono, ME 04469 USA
关键词
D O I
10.1063/1.1867392
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A simple method has been developed for accurately measuring the crystallographic orientation of a single crystal boule, employing a conventional four-circle x-ray diffraction arrangement in the rocking curve mode which relaxes the need for precise instrument and/or reference alignment. By acquiring a total of eight rocking curve measurements at specific orientations about the specimen azimuth, the absolute miscut angle between a crystal surface and the desired crystallographic plane can be resolved to within +/- 0.01 degrees. (C) 2005 American Institute of Physics.
引用
收藏
页数:4
相关论文
共 9 条
[1]  
BRADACZEK H, 1993, PROCEEDINGS OF THE 1993 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, P416, DOI 10.1109/FREQ.1993.367427
[2]   PRECISE X-RAY RELATIVE MEASUREMENT OF LATTICE-PARAMETERS OF SILICON-WAFERS BY MULTIPLE-CRYSTAL BRAGG-CASE DIFFRACTOMETRY - COMPUTER-SIMULATION OF THE EXPERIMENT [J].
CEMBALI, F ;
FABBRI, R ;
SERVIDORI, M ;
ZANI, A ;
BASILE, G ;
CAVAGNERO, G ;
BERGAMIN, A ;
ZOSI, G .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1992, 25 :424-431
[3]   ALIGNMENT OF DOUBLE-CRYSTAL DIFFRACTOMETERS [J].
FEWSTER, PF .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1985, 18 (OCT) :334-338
[4]   X-RAY-DIFFRACTION STUDIES OF MISCUT CRYSTAL-SURFACES AND OVERLAYERS - A DYNAMICAL DIFFRACTION APPROACH [J].
KAU, CP ;
GAU, TS ;
CHANG, SL .
MATERIALS CHEMISTRY AND PHYSICS, 1995, 41 (02) :128-133
[5]  
LOXLEY N, 1994, MATER RES SOC SYMP P, V324, P451
[6]   MEASUREMENT OF ALUMINUM CONCENTRATION IN GAALAS EPITAXIAL LAYERS BY DOUBLE-AXIS X-RAY-DIFFRACTION [J].
TANNER, BK ;
MILES, SJ ;
PETERSON, GG ;
SACKS, RN .
MATERIALS LETTERS, 1988, 7 (5-6) :239-241
[7]  
TANNER BK, 1986, MATER RES SOC S P, V69, P191
[8]   Periodic faceting of a Si(113) surface miscut towards [1(1)over-bar-0] [J].
Yoon, M ;
Mochrie, SGJ ;
Tate, MW ;
Gruner, SM ;
Eikenberry, EF .
SURFACE SCIENCE, 1998, 411 (1-2) :70-85
[9]   PERIODIC STEP-BUNCHING ON A MISCUT PT(111) SURFACE [J].
YOON, M ;
MOCHRIE, SGJ ;
ZEHNER, DM ;
WATSON, GM ;
GIBBS, D .
SURFACE SCIENCE, 1995, 338 (1-3) :225-235