A hybrid AlGaInAs-silicon evanescent waveguide photodetector

被引:139
作者
Park, Hyundai [1 ]
Fang, Alexander W.
Jones, Richard
Cohen, Oded
Raday, Omri
Sysak, Matthew N.
Paniccia, Mario J.
Bowers, John E.
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Intel Corp, Santa Clara, CA 95054 USA
[3] Intel Corp, IL-91031 Jerusalem, Israel
来源
OPTICS EXPRESS | 2007年 / 15卷 / 10期
关键词
D O I
10.1364/OE.15.006044
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report a waveguide photodetector utilizing a hybrid waveguide structure consisting of A1GaInAs quantum wells bonded to a silicon waveguide. The light in the hybrid waveguide is absorbed by the A1GaInAs quantum wells under reverse bias. The photodetector has a fiber coupled responsivity of 0.31 A/W with an internal quantum efficiency of 90 % over the 1.5 mu m wavelength range. This photodetector structure can be integrated with silicon evanescent lasers for power monitors or integrated with silicon evanescent amplifiers for preamplified receivers. (C) 2007 Optical Society of America
引用
收藏
页码:6044 / 6052
页数:9
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