Synthesis of BaTiO3 thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser

被引：14

作者：

Masuda, Y

Fujita, S

Baba, A

Masumoto, H

Nagata, K

Hirai, T

机构：

[1] TOHOKU UNIV,INST MAT RES,AOBA KU,SENDAI,MIYAGI 98077,JAPAN

[2] NATL DEF ACAD,DEPT ELECT ENGN,YOKOSUKA,KANAGAWA 239,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 9B期

关键词：

ferroelectrics; BaTi0.9(Hf0.5Zr0.5)(0.09)O-3; BaTiO3; family; thin films; YAC laser ablation; fourth harmonic generation;

D O I：

10.1143/JJAP.36.5834

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

For the first time to our knowledge, BaTi(Hf0.5Zr0.5)O-3 (BTHZ) thin films have been successfully synthesized using a laser ablation technique that employs the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser. The BTHZ thin him with a preferred orientation in the c-axis was prepared under an oxygen gas pressure of 3 Pa at 800 degrees C. Chemical bonds in the BTHZ compounds can easily be broken by irradiation at an optical energy of 7.47 x 10(-19) J and an optical power density of 300 mJ/cm(2). Crystallinity of the deposited films is dominated by the mean free path of each element.

引用

页码：5834 / 5839

页数：6

共 20 条

[1] FERROELECTRIC PROPERTIES IN EPITAXIALLY GROWN BAXSR1-XTIO3 THIN-FILMS [J].

ABE, K ;

KOMATSU, S .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (12) :6461-6465

[2] PREPARATION OF (100)-ORIENTED LEAD-ZIRCONATE-TITANATE FILMS BY SOL-GEL TECHNIQUE [J].

AOKI, K ;

FUKUDA, Y ;

NISHIMURA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4147-4149

[3] Photoinduced changes in the fatigue behavior of SrBi2Ta2O9 and Pb(Zr,Ti)O-3 thin films [J].

Dimos, D ;

AlShareef, HN ;

Warren, WL ;

Tuttle, BA .

JOURNAL OF APPLIED PHYSICS, 1996, 80 (03) :1682-1687

[4] Chemical processing and dielectric properties of ferroelectric SrBi2Ta2O9 thin films [J].

Hayashi, T ;

Takahashi, H ;

Hara, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (9B) :4952-4955

[5] PB(ZR, TI)O3 THIN-FILM PREPARATION BY MULTITARGET MAGNETRON SPUTTERING [J].

HIRATA, K ;

HOSOKAWA, N ;

HASE, T ;

SAKUMA, T ;

MIYASAKA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B) :3021-3024

[6] FABRICATION OF FERROELECTRIC BI4TI3O12 THIN-FILMS BY DIPPING-PYROLYSIS OF METAL NAPHTHENATES AND MICROPATTERNS BY AN ELECTRON-BEAM [J].

KAKIMI, A ;

OKAMURA, S ;

YAGI, Y ;

MORI, K ;

TSUKAMOTO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (9B) :5301-5304

[7] (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition on Ru electrodes [J].

Kawahara, T ;

Yamamuka, M ;

Yuuki, A ;

Ono, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (9B) :4880-4885

[8] High-permittivity perovskite thin films for dynamic random-access memories [J].

Kingon, AI ;

Streiffer, SK ;

Basceri, C ;

Summerfelt, SR .

MRS BULLETIN, 1996, 21 (07) :46-52

[9] ELECTRODE CONTACTS ON FERROELECTRIC PB(ZRXTI1-X)O-3 AND SRBI2TA2O9 THIN-FILMS AND THEIR INFLUENCE ON FATIGUE PROPERTIES [J].

LEE, JJ ;

THIO, CL ;

DESU, SB .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (08) :5073-5078

[10] PREPARATION OF BI4TI3O12 FILMS ON A SINGLE-CRYSTAL SAPPHIRE SUBSTRATE WITH ELECTRON-CYCLOTRON RESONANCE PLASMA SPUTTERING [J].

MASUMOTO, H ;

GOTO, T ;

MASUDA, Y ;

BABA, A ;

HIRAI, T .

APPLIED PHYSICS LETTERS, 1991, 58 (03) :243-245

← 1 2 →