Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells

被引:6
作者
Allier, CP
Hollander, RW
Sarro, PM
de Boer, M
van Eijk, CWE
机构
[1] Delft Univ Technol, Interfac Reactor Inst, Radiat Technol Grp, NL-2629 JB Delft, Netherlands
[2] Delft Univ Technol, Delft Inst Microelect & Submicron Technol, NL-2600 AA Delft, Netherlands
[3] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands
关键词
D O I
10.1109/23.872967
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have proposed a new type of gamma-ray camera, which takes advantage of micromachining technology [1]. It consists of an array of scintillator crystals encapsulated in well-type silicon sensors. The light created by the interaction of an X-ray or a gamma ray with the crystal material is confined by vertical silicon sidewalls and collected onto the avalanche photodiode at the bottom of the well. Several parameters of the photodiode need to be optimised: uniformity and efficiency of the light detection, gain, electronic noise and breakdown voltage. In order to evaluate these parameters we have processed 3*3 arrays of 1.8 mm(2), similar to 10 mu m thick photodiodes using (100) wafers etched in a potassium hydroxide (KOH) solution. Their optical response at 675 nm is comparable to that of a 500 mu m thick silicon PIN diode. The low light detection efficiency is compensated by internal amplification. Several scintillator materials have been positioned in the wells on top of the thin photodiodes, i.e. a layer of structured CsI(TI) and single crystals of CsI(Tl) and Lu2S3(Ce3+). First experiments of gamma-ray detection have been performed.
引用
收藏
页码:1303 / 1306
页数:4
相关论文
共 12 条
[1]   Comparative study of silicon detectors [J].
Allier, CP ;
Valk, H ;
Huizenga, J ;
Bom, VR ;
Hollander, RW ;
van Eijk, CWE .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1998, 45 (03) :576-580
[2]  
ALLIER CP, 1998, P 1998 EUR SOL STAT, P176
[3]   Scintillation detection using a silicon drift chamber with on-chip electronics [J].
Fiorini, C ;
Perotti, F .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1997, 401 (01) :104-112
[4]   PROPERTIES OF CSI(TL) RENAISSANCE OF AN OLD SCINTILLATION MATERIAL [J].
GRASSMANN, H ;
LORENZ, E ;
MOSER, HG .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1985, 228 (2-3) :323-326
[5]   MULTIPLICATION NOISE IN UNIFORM AVALANCHE DIODES [J].
MCINTYRE, RJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1966, ED13 (01) :164-+
[6]  
MUSIENKO Y, IN PRESS P 2 C NEW D, V99
[7]   Study of a large area avalanche photodiode as a fast photon and a soft X-ray detector [J].
Ochi, A ;
Nishi, Y ;
Tanimori, T .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1996, 378 (1-2) :267-274
[8]   APPLICATION OF WET CHEMICAL SELECTIVE ETCH TECHNIQUES TO THE FABRICATION OF THIN SILICON DETECTORS [J].
SCHMIDT, B ;
VONBORANY, J ;
SCHUBERT, D .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1993, 326 (1-2) :21-26
[9]   The study of α/γ ratio for inorganic scintillation detectors [J].
Sysoeva, EV ;
Tarasov, VA ;
Zelenskaya, OV ;
Sulyga, VA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1998, 414 (2-3) :274-278
[10]  
TRIXELL, COMMUNICATION