AlGaN/GaN HEMTs on Si(111) with 6.6 W/mm output power density

被引:63
作者
Behtash, R
Tobler, H
Neuburger, M
Schurr, A
Leier, H
Cordier, Y
Semond, F
Natali, F
Massies, J
机构
[1] DaimlerChrysler AG, Res & Technol, D-89013 Ulm, Germany
[2] Univ Ulm, Dept Electron Devices & Circuits, Ulm, Germany
[3] CNRS, CRHEA, F-06560 Valbonne, France
关键词
D O I
10.1049/el:20030395
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Al0.27Ga0.73N/GaN HEMTS have been realised on resistive S(111) substrates. The epitaxial structure was grown by MBE yielding a channel mobility of 1440 cm(2)/Vs (room temperature) and a sheet carrier density of 9.6c12 cm(-2). Large signal evaluation of transistors with gate length of 0.25 mum and gate width of 2 x 125 mum yields up to 1.65 W CW output power at 2 GHz corresponding to a power density of 6.6 W/mm. These results arc thought to represent the highest output power density so far achieved for GaN-based HEMTs on silicon substrates.
引用
收藏
页码:626 / 628
页数:3
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