The aging effect on SnO2-Au thin film sensors:: electrical and structural characterization

被引:87
作者
Nelli, P
Faglia, G
Sberveglieri, G
Cereda, E
Gabetta, G
Dieguez, A
Romano-Rodriguez, A
Morante, JR
机构
[1] Univ Brescia, Dept Chem & Phys Mat, I-25133 Brescia, Italy
[2] INFM, I-25133 Brescia, Italy
[3] CISE SpA, I-20090 Milan, Italy
[4] Univ Barcelona, Dept Appl Phys & Elect, E-08028 Barcelona, Spain
关键词
tin oxide; thin films; carbon monoxide; long-term stability;
D O I
10.1016/S0040-6090(00)01011-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
There is an increasing demand for semiconducting gas sensors for several monitoring applications that have sensitivity, selectivity and reliability on a long-term scale. In this paper, we have described the preparation of SnO2-Au thin film sensors by the RGTO technique; these sensors have proved to be capable of sensitive and selective detection of CO. The TEM and AES analysis showed that 6 months of sensor aging at 400 degrees C did not produce any valuable rearrangement of gold atoms onto a tin dioxide surface, Most of the sensor resistance variation was observed during the first 20 days, and a limited drift was observed in the remaining period. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:249 / 253
页数:5
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