Fatigue of polycrystalline silicon under long-term cyclic loading

被引：90

作者：

Bagdahn, J

Sharpe, WN

机构：

[1] Johns Hopkins Univ, Dept Mech Engn, Baltimore, MD 21218 USA

[2] Fraunhofer Inst Mech Mat, D-06120 Halle An Der Saale, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 103卷 / 1-2期

关键词：

polysilicon; reliability; strength; fatigue;

D O I：

10.1016/S0924-4247(02)00328-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The long-term mechanical behavior of 3.5 mum thick and 50 mum wide polysilicon tensile specimens under tension-tension cyclic loading was investigated. The use of an external actuator allows the variation of the test frequency between 50 and 6000 Hz. It was shown, that the strength of the samples decreases with an increasing number of cycles. The tensile strength of sigma(c) = 1.1 GPa of virgin samples was reduced by about 35% to a fatigue strength of sigma(f) = 0.70 GPa after 10(9) cycles. No influence of frequency of the fatigue behavior in the range of 50-6000 Hz was observed. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：9 / 15

页数：7

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