Epitaxial TiC/SiC multilayers

被引：20

作者：

Eklund, P. ^{[1
]}

Hogberg, H. ^{[1
]}

Hultman, L. ^{[1
]}

机构：

[1] Linkoping Univ, IFM, Dept Phys Chem & Biol, Thin Film Phys Div, S-58183 Linkoping, Sweden

来源：

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | 2007年 / 1卷 / 03期

关键词：

D O I：

10.1002/pssr.200701027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Epitaxial TiC/SiC multilayers were grown by magnetron sputtering at a substrate temperature of 550 degrees C, where SiC is normally amorphous. The epitaxial TiC template induced growth of cubic SiC up to a thickness of similar to 2 nm. Thicker SiC layers result in a direct transition to growth of the metastable amorphous SiC followed by renucleation of nanocrystalline TiC layers. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：113 / 115

页数：3

共 13 条

[1] Photoemission studies of Ti3SiC2 and nanocrystalline-TiC/amorphous-SiC nanocomposite thin films [J].

Eklund, P. ;

Virojanadara, C. ;

Emmerlich, J. ;

Johansson, L. I. ;

Hogberg, H. ;

Hultman, L. .

PHYSICAL REVIEW B, 2006, 74 (04)

[2] Structural, electrical, and mechanical properties of nc-TiC/a-SiC nanocomposite thin films [J].

Eklund, P ;

Emmerlich, J ;

Högberg, H ;

Wilhelmsson, O ;

Isberg, P ;

Birch, J ;

Persson, ROÅ ;

Jansson, U ;

Hultman, L .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (06) :2486-2495

[3] Growth of Ti3SiC2 thin films by elemental target magnetron sputtering [J].

Emmerlich, J ;

Högberg, H ;

Sasvári, S ;

Persson, POÅ ;

Hultman, L ;

Palmquist, JP ;

Jansson, U ;

Molina-Aldareguia, JM ;

Czigány, Z .

JOURNAL OF APPLIED PHYSICS, 2004, 96 (09) :4817-4826

[4] Growth, structure, and mechanical properties of transition metal carbide superlattices [J].

Högberg, H ;

Birch, J ;

Odén, M ;

Malm, JO ;

Hultman, L ;

Jansson, U .

JOURNAL OF MATERIALS RESEARCH, 2001, 16 (05) :1301-1310

[5] Interface structure in superhard TiN-SiN nanolaminates and nanocomposites:: Film growth experiments and ab initio calculations [J].

Hultman, Lars ;

Bareno, Javier ;

Flink, Axel ;

Soderberg, Hans ;

Larsson, Karin ;

Petrova, Vania ;

Oden, Magnus ;

Greene, J. E. ;

Petrov, Ivan .

PHYSICAL REVIEW B, 2007, 75 (15)

[6] Crystallization of amorphous SiC and superhardness effect in TiN/SiC nanomultilayers [J].

Kong, Ming ;

Dai, Jiawei ;

Lao, Jijun ;

Li, Geyang .

APPLIED SURFACE SCIENCE, 2007, 253 (10) :4734-4739

[7] Mutual promotion effect of crystal growth in TiN/SiC nanomultilayers [J].

Lao, JJ ;

Shao, N ;

Mei, FH ;

Li, GY ;

Gu, MY .

APPLIED PHYSICS LETTERS, 2005, 86 (01) :011902-1

[8] Electrical characterization of TiC ohmic contacts to aluminum ion implanted 4H-silicon carbide [J].

Lee, SK ;

Zetterling, CM ;

Danielsson, E ;

Östling, M ;

Palmquist, JP ;

Högberg, H ;

Jansson, U .

APPLIED PHYSICS LETTERS, 2000, 77 (10) :1478-1480

[9] Hard and superhard nanocomposite coatings [J].

Musil, J .

SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3) :322-330

[10] Deposition of transition metal carbide superlattices using C60 as a carbon source [J].

Norin, L ;

Hogberg, H ;

Lu, J ;

Jansson, U ;

Malm, JO .

APPLIED PHYSICS LETTERS, 1998, 73 (19) :2754-2756

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