High-temperature leakage improvement in metal-insulator-metal capacitors by work-function tuning

被引：49

作者：

Chiang, K. C. ^{[1
]}

Cheng, C. H.

Pan, H. C.

Hsiao, N.

Chou, C. P.

Chin, Albert

Hwang, H. L.

机构：

[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30010, Taiwan

[2] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 30056, Taiwan

[3] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu 300, Taiwan

来源：

IEEE ELECTRON DEVICE LETTERS | 2007年 / 28卷 / 03期

关键词：

capacitor; high temperature; metal-insulator-metal (MIM); Ni; thermal leakage;

D O I：

10.1109/LED.2007.891265

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using low-cost and high work-function Ni, a low leakage current of 5 x 10(-6) A/cm(2) at 125 degrees C is obtained in a high 25-fF/mu m(2)-density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 degrees C. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall k value beyond previous laminate structure.

引用

页码：235 / 237

页数：3

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