Development of a metal-tip cantilever for noncontact atomic force microscopy

被引：36

作者：

Akiyama, K

Eguchi, T

An, T

Fujikawa, Y

Yamada-Takamura, Y

Sakurai, T

Hasegawa, Y

机构：

[1] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan

[2] Japan Sci & Technol Corp, PRESTO, Tokyo, Japan

[3] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2005年 / 76卷 / 03期

关键词：

D O I：

10.1063/1.1865812

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 [仪器科学与技术]; 080401 [精密仪器及机械]; 081102 [检测技术与自动化装置];

摘要：

We report on a focused-ion-beam fabrication of a metal-tip cantilever for noncontact atomic force microscopy (AFM) and demonstrate its superior performance by observing atomically resolved AFM images of the Si(111)7x7 surface. Characterization of the tip apex by transmission electron microscope revealed that the tip radius is less than 5 nm. Detrimental changes in the resonance frequency and the Q factor of the cantilever due to the attachment of the metal tip are small and do not affect the performance of the AFM imaging. Since the fabrication technique is applicable to any materials, various functional probes can be developed with this method. (C) 2005 American Institute of Physics.

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页数：3

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