Double-gate tunnel FET with high-κ gate dielectric

被引:1254
作者
Boucart, Kathy [1 ]
Mihai Ionescu, Adrian [1 ]
机构
[1] Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland
基金
美国国家科学基金会;
关键词
band-to-band tunneling; double gate (DG); gated p-i-n diode; high-kappa dielectric; subthreshold swing; tunnel field-effect transistor (FET);
D O I
10.1109/TED.2007.899389
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we propose and validate a novel design for a double-gate tunnel field-effect transistor (DG Tunnel FET), for which the simulations show significant improvements compared with single-gate devices using an SiO2 gate dielectric. For the first time, DG Tunnel FET devices, which are using a high-kappa gate dielectric, are explored using realistic design parameters, showing an ON-current as high as 0.23 mA for a gate voltage of 1.8 V, an OFF-current of less than 1 fA (neglecting gate leakage), an improved average subthreshold swing of 57 mV/dec, and a minimum point slope of 11 mV/dec. The 2-D nature of Tunnel FET current flow is studied, demonstrating that the current is not confined to a channel at the gate-dielectric surface. When varying temperature, Tunnel FETs with a high-kappa gate dielectric have a smaller threshold voltage shift than those Using SiO2, while the subthreshold slope for fixed values of V-g remains nearly unchanged, in contrast with the traditional MOSFET. Moreover, an I-on/I-off ratio of more than 2 x 10(11) is shown for simulated devices with a gate length (over the intrinsic region) of 50 nm, which indicates that the Tunnel FET is a promising candidate to achieve better-than-ITRS low-standby-power switch performance.
引用
收藏
页码:1725 / 1733
页数:9
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