Coupled-barrier diffusion: The case of oxygen in silicon

被引:57
作者
Ramamoorthy, M
Pantelides, ST
机构
[1] Department of Physics and Astronomy, Vanderbilt University, Nashville, TN
关键词
D O I
10.1103/PhysRevLett.76.267
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Oxygen migration in silicon corresponds to an apparently simple jump between neighboring bridge sites. Yet extensive theoretical calculations have so far produced conflicting results and have failed to provide a satisfactory account of the observed 2.5 eV activation energy. We report a comprehensive set of first-principles calculations that demonstrate that the seemingly simple oxygen jump is actually a complex process involving coupled barriers and can be properly described quantitatively in terms of an energy hypersurface with a ''saddle ridge'' and an activation energy of similar to 2.5 eV. Earlier calculations correspond to different points or lines on this hypersurface.
引用
收藏
页码:267 / 270
页数:4
相关论文
共 15 条
[1]   GROUND-STATE OF THE ELECTRON-GAS BY A STOCHASTIC METHOD [J].
CEPERLEY, DM ;
ALDER, BJ .
PHYSICAL REVIEW LETTERS, 1980, 45 (07) :566-569
[2]   SPECIAL POINTS IN BRILLOUIN ZONE [J].
CHADI, DJ ;
COHEN, ML .
PHYSICAL REVIEW B, 1973, 8 (12) :5747-5753
[3]   CONFIGURATION + DIFFUSION OF ISOLATED OXYGEN IN SILICON + GERMANIUM [J].
CORBETT, JW ;
MCDONALD, RS ;
WATKINS, GD .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1964, 25 (08) :873-&
[4]   ATOMISTIC CALCULATION OF OXYGEN DIFFUSIVITY IN CRYSTALLINE SILICON [J].
JIANG, Z ;
BROWN, RA .
PHYSICAL REVIEW LETTERS, 1995, 74 (11) :2046-2049
[5]   GREENS-MATRIX CALCULATION OF TOTAL ENERGIES OF POINT-DEFECTS IN SILICON [J].
KELLY, PJ ;
CAR, R .
PHYSICAL REVIEW B, 1992, 45 (12) :6543-6563
[6]   1ST-PRINCIPLES INVESTIGATION OF FERROELECTRICITY IN PEROVSKITE COMPOUNDS [J].
KINGSMITH, RD ;
VANDERBILT, D .
PHYSICAL REVIEW B, 1994, 49 (09) :5828-5844
[7]   1ST-PRINCIPLES STUDY OF CRYSTALLINE SILICA [J].
LIU, F ;
GAROFALINI, SH ;
KINGSMITH, D ;
VANDERBILT, D .
PHYSICAL REVIEW B, 1994, 49 (18) :12528-12534
[8]   ATOMIC OXYGEN IN SILICON - THE FORMATION OF THE SI-O-SI BOND [J].
MARTINEZ, E ;
PLANS, J ;
YNDURAIN, F .
PHYSICAL REVIEW B, 1987, 36 (15) :8043-8048
[9]   DIFFUSIVITY OF OXYGEN IN SILICON DURING STEAM OXIDATION [J].
MIKKELSEN, JC .
APPLIED PHYSICS LETTERS, 1982, 40 (04) :336-337
[10]  
NEEDELS M, 1991, MATER RES SOC SYMP P, V209, P103