Excimer laser polymer ablation: twenty years on

被引：164

作者：

Dyer, PE ^{[1
]}

机构：

[1] Univ Hull, Dept Phys, Kingston Upon Hull HU6 7RX, N Humberside, England

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 02期

关键词：

D O I：

10.1007/s00339-003-2137-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Research and development in excimer laser polymer ablation has been actively pursued for some twenty years, driven by interest in the basic science as well as by numerous applications that have emerged for this high-resolution technique for material removal. This paper reviews some of the basic mechanistic aspects of the UV laser-polymer interaction as a prelude to dealing with practical matters related to polymer processing by ablation. Applications in micro-machining and potential areas for future research are briefly covered.

引用

页码：167 / 173

页数：7

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