POLYMER FILM CUTTING AND ABLATIVE ETCHING USING A 1-KHZ XECL LASER

被引：18

作者：

BISHOP, GJ

DYER, PE

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 11期

关键词：

D O I：

10.1063/1.96337

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1229 / 1231

页数：3

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[9] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION
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