Influence of holes on neutral trap generation

被引:14
作者
Sakakibara, K
Ajika, N
Miyoshi, H
机构
[1] ULSI Laboratory, Mitsubishi Electric Corporation
关键词
D O I
10.1109/16.644651
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using a newly proposed method for estimating the neutral trap density, generation characteristics of the neutral trap during various stress types have been investigated, From the analysis of the trap-generation kinetics, two types of trap generation closely related to holes have been identified, At the first stage of stress application, holes interact with the pre-existing structural origins of the neutral traps, then the neutral traps are generated, Influence of hole energy on this type of trap generation is also identified, After that, as holes pass, they also create the structural origins of the traps, The holes interact with these structural origins and the neutral traps are generated as a secondary effect, Thus, the increase in the neutral trap density shows up clearly with increase in the hole fluence, The stress-strength dependence of the increase in the neutral trap density can also be interpreted in terms of the influence of hole energy on the trap generation.
引用
收藏
页码:2274 / 2280
页数:7
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