Nanoparticle impact micromachining

被引：22

作者：

Gruber, A ^{[1
]}

Gspann, J

机构：

[1] Univ Karlsruhe, D-76021 Karlsruhe, Germany

[2] Forschungszentrum Karlsruhe, Inst Mikrostrukturtech, D-76021 Karlsruhe, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 06期

关键词：

D O I：

10.1116/1.589647

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanoparticles of about 1000 molecules of CO2 accelerated to 20 km/s are used for surface micromachining. Isolated impacts are found to generate hillocks of about 0.5 nm in height and 20 nm in radius on silicon. The cluster material penetrates up to 20 nm into the target, suggesting the initial formation of transitory craters that relax by elastic rebound. (C) 1997 American Vacuum Society.

引用

页码：2362 / 2364

页数：3

共 7 条

[1] METASTABLE EXCITATIONS OF LARGE CLUSTERS OF HE-3, HE-4 OR NE ATOMS [J].