Polymer viscoelasticity and residual stress effects on nanoimprint lithography

被引：69

作者：

Ding, Yifu

Ro, Hyun Wook

Douglas, Jack F.

Jones, Ronald L.

Hine, Daniel R.

Karim, Alamgir

Soles, Christopher L.

机构：

[1] Natl Inst Stand & Technol, Div Polymers, Gaithersburg, MD 20899 USA

[2] Univ Maryland, Lab Phys Sci, College Pk, MD 20740 USA

来源：

ADVANCED MATERIALS | 2007年 / 19卷 / 10期

关键词：

D O I：

10.1002/adma.200601998

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The decay kinetics of polystyrene (PS) gratings are monitored by tracking the intensity of the first-order laser diffraction peak as a function of annealing time. For low-molecular-mass PS (24 kg mol(-1), blue circles), an exponential response suggests that the pattern decay is a surface-tension driven viscous flow. In high-molecular-mass PS (1007 kg mol(-1), green circles) a complicated response includes a rapid elastic recovery, a power-law creep, and a viscouslike flow (see figure).

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页码：1377 / +

页数：7

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