Analysis of small deflection touch mode behavior in capacitive pressure sensors

被引：38

作者：

Fragiacomo, Giulio ^{[1
]}

Ansbaek, Thor ^{[2
]}

Pedersen, Thomas ^{[1
]}

Hansen, Ole ^{[1
,3
]}

Thomsen, Erik V. ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

[2] Haldor Topsoe Res Labs, Dept Photon Engn, DK-2800 Lyngby, Denmark

[3] Haldor Topsoe Res Labs, Ctr Individual Nanoparticle Funct, DK-2800 Lyngby, Denmark

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2010年 / 161卷 / 1-2期

关键词：

Plate deflection; Analytical model; Capacitive sensor; Touch mode;

D O I：

10.1016/j.sna.2010.04.030

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analytical such that geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent agreement with the experimental data. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：114 / 119

页数：6

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