Artificial control of ZnO nanostructures grown by metalorganic chemical vapor deposition

被引：7

作者：

Fujita, S ^{[1
]}

Kim, SW

Ueda, M

Fujita, S ^{[1
]}

机构：

[1] Kyoto Univ, Int Innovat Ctr, Sakyo Ku, Kyoto 6068501, Japan

[2] Kyoto Univ, Grad Sch Engn, Adv Res Inst Nanoscale Sci & Engn, Kyoto 6158510, Japan

[3] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 2004年 / 272卷 / 1-4期

关键词：

nanostructures; nucleation; metalorganic chemical vapor deposition; oxides; semiconducting II-VI materials;

D O I：

10.1016/j.jcrysgro.2004.08.078

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Advantage and role of focused ion beam (FIB) for nanopatterning of the substrates toward the artificial control of self-assembly processes of semiconductor nanostructures are shown and discussed. Two-dimensional ZnO nanodot arrays well-ordered in size and position of the nanodots are demonstrated, for example, the nanodots with diameter of 130+/-10 and 18+/-5 nm were two dimensionally arrayed with periods of 750 and 100 nm, respectively. Gallium implanted in the FIB-nanopatterning is suggested as a plausible reason for the selective nucleation of ZnO nanodots on nanopatterned substrates. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：138 / 142

页数：5

共 10 条

[1] Magnetization reversal in arrays of perpendicularly magnetized ultrathin dots coupled by dipolar interaction [J].

Aign, T ;

Meyer, P ;

Lemerle, S ;

Jamet, JP ;

Ferré, J ;

Mathet, V ;

Chappert, C ;

Gierak, J ;

Vieu, C ;

Rousseaux, F ;

Launois, H ;

Bernas, H .

PHYSICAL REVIEW LETTERS, 1998, 81 (25) :5656-5659

[2] POSITIONING SINGLE ATOMS WITH A SCANNING TUNNELING MICROSCOPE [J].

EIGLER, DM ;

SCHWEIZER, EK .

NATURE, 1990, 344 (6266) :524-526

[3] Fabrication of CdZnSe/ZnSe quantum dots and quantum wires by electron beam lithography and wet chemical etching [J].

Illing, M ;

Bacher, G ;

Kummell, T ;

Forchel, A ;

Hommel, D ;

Jobst, B ;

Landwehr, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2792-2796

[4] Selective growth of ZnO nanodots prepared by metalorganic chemical vapor deposition on focused-ion beam-nanopatterned substrates [J].

Kim, SW ;

Kotani, T ;

Ueda, M ;

Fujita, S ;

Fujita, S .

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2004, 21 (2-4) :601-605

[5] Self-tailored one-dimensional ZnO nanodot arrays formed by metalorganic chemical vapor deposition [J].

Kim, SW ;

Ueda, M ;

Kotani, T ;

Fujita, S ;

Fujita, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2003, 42 (6A) :L568-L571

[6] DIRECT FORMATION OF QUANTUM-SIZED DOTS FROM UNIFORM COHERENT ISLANDS OF INGAAS ON GAAS-SURFACES [J].

LEONARD, D ;

KRISHNAMURTHY, M ;

REAVES, CM ;

DENBAARS, SP ;

PETROFF, PM .

APPLIED PHYSICS LETTERS, 1993, 63 (23) :3203-3205

[7] Focused ion beam patterning for fabrication of periodical two-dimensional zinc oxide nanodot arrays [J].

Ueda, M ;

Kim, SW ;

Fujita, S ;

Fujita, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2004, 43 (5B) :L652-L654

[8] FABRICATION OF SUB-100-NM LINEWIDTH PERIODIC STRUCTURES FOR STUDY OF QUANTUM EFFECTS FROM INTERFERENCE AND CONFINEMENT IN SI INVERSION-LAYERS [J].

WARREN, AC ;

PLOTNIK, I ;

ANDERSON, EH ;

SCHATTENBURG, ML ;

ANTONIADIS, DA ;

SMITH, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :365-368

[9] Growth kinetics and optical properties of self-organized GaN quantum dots [J].

Widmann, F ;

Daudin, B ;

Feuillet, G ;

Samson, Y ;

Rouviere, JL ;

Pelekanos, N .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (12) :7618-7624

[10] Formation of self-assembling CdSe quantum dots on ZnSe by molecular beam epitaxy [J].

Xin, SH ;

Wang, PD ;

Yin, A ;

Kim, C ;

Dobrowolska, M ;

Merz, JL ;

Furdyna, JK .

APPLIED PHYSICS LETTERS, 1996, 69 (25) :3884-3886

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