FABRICATION OF SUB-100-NM LINEWIDTH PERIODIC STRUCTURES FOR STUDY OF QUANTUM EFFECTS FROM INTERFERENCE AND CONFINEMENT IN SI INVERSION-LAYERS

被引：35

作者：

WARREN, AC

PLOTNIK, I

ANDERSON, EH

SCHATTENBURG, ML

ANTONIADIS, DA

SMITH, HI

机构：

[1] MIT, DEPT ELECT ENGN & COMP SCI, CAMBRIDGE, MA 02139 USA

[2] MIT, DEPT PHYS, CAMBRIDGE, MA 02139 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期

关键词：

D O I：

10.1116/1.583333

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：365 / 368

页数：4

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