Similarity of plasma-polymerized tetrafluoroethylene and fluoropolymer films deposited by rf sputtering of poly(tetrafluoroethylene)

被引：34

作者：

Golub, MA ^{[1
]}

Wydeven, T

Johnson, AL

机构：

[1] NASA, Ames Res Ctr, Moffett Field, CA 94035 USA

[2] Lockheed Martin Engn & Sci, Ames Res Ctr, Moffett Field, CA 94035 USA

[3] Surface Sci Labs, Mt View, CA 94043 USA

来源：

LANGMUIR | 1998年 / 14卷 / 08期

关键词：

D O I：

10.1021/la971102e

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The infrared (IR) or X-ray photoelectron spectroscopy (XPS) characterization of products obtained from plasma polymerization of tetrafluoroethylene showed similar structures compared with that of fluoropolymer deposits formed on polytetrafluoroethylene (PTFE). This similarity occurred in studies where radiofrequency-sputtered PTFE (SPTFE) and plasma-polymerized PTFE (PPTFE) were not prepared in the same plasma reactor. The preparation of PPTFE and SPTFE prepared in the same apparatus and under comparable low-power glow discharge conditions and their Fourier transform IR, XPS and ultraviolet-visible spectra are discussed.

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页码：2217 / 2220

页数：4

相关论文

共 26 条

[1] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE IN A FIELD-FREE ZONE [J].

BUZZARD, PD ;

SOONG, DS ;

BELL, AT .

JOURNAL OF APPLIED POLYMER SCIENCE, 1982, 27 (10) :3965-3985

[2] PLASMA POLYMERIZATION OF ETHYLENE AND THE SERIES OF FLUOROETHYLENES - PLASMA EFFLUENT MASS-SPECTROMETRY AND ESCA STUDIES [J].

DILKS, A ;

KAY, E .

MACROMOLECULES, 1981, 14 (03) :855-862

[3] INVESTIGATIONS OF STRUCTURE OF THIN FLUOROCARBON FILMS BY X-RAY DIFFRACTION AND INFRARED SPECTROSCOPY [J].

GIEGENGACK, H ;

HINZE, D .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1971, 8 (02) :513-+

[4]

Golub M.A., 1996, Plasmas and Polymers, V1, P173

[5] PLASMA COPOLYMERIZATION OF ETHYLENE AND TETRAFLUOROETHYLENE [J].

GOLUB, MA ;

WYDEVEN, T ;

CORMIA, RD .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1992, 30 (13) :2683-2692

[6]

GOLUB MA, UNPUB POLYM PREPR AM

[7] CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS [J].

HETZLER, U ;

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) :5617-5623

[8] Thin polymer films prepared by radio frequency plasma sputtering of polytetrafluoroethylene and polyetherimide targets [J].

Hishmeh, GA ;

Barr, TL ;

Sklyarov, A ;

Hardcastle, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (03) :1330-1338

[9] SPUTTERED AND PLASMA POLYMERIZED FLUOROCARBON FILMS [J].

HOLLAND, L ;

BIEDERMAN, H ;

OJHA, SM .

THIN SOLID FILMS, 1976, 35 (02) :L19-L21

[10] PLASMA-STRUCTURE DEPENDENCE OF THE GROWTH-MECHANISM OF PLASMA-POLYMERIZED FLUOROCARBON FILMS WITH RESIDUAL RADICALS [J].

HORIE, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (05) :2490-2497