Silicon scanning mirror of two DOF with compensation current routing

An electromagnetic scanning mirror with two DOF using a single permanent magnet is proposed. In the radial magnetic field, driving currents produce Lorentz forces about two axes of rotation. For an electromagnetic scanning mirror, it is very important to reduce the crosstalk in the current carrying lines. The scanning mirror uses compensation current routing to reduce the crosstatk and enable independent simultaneous control of each axis of rotation. Two independent current flows produce torque from the Lorentz force in the external magnetic field from a single permanent magnet under the mirror. The mirror is 3.5 mm x 3.5 mm and the movable frame 5.7 mm x 5.7 mm. The measured resonance frequency of the mirror is 2190 Hz and that of the movable frame is 920 Hz. In the resonance mode the angle of rotation of the mirror is +/-1.51degrees for an applied ac current of 20 mA(rms) and for the movable frame it is +/-5.71degrees for the same current. The system has a reduced disturbance sensitivity of 9.93 x 10(-6), which is the ratio of angle of rotation of the movable frame due to the mirror. The scanning mirror can be applied to conventional imaging systems, scanning systems, etc.