Effect of heat treatment of TiN films deposited by CFUBMS

被引：11

作者：

Arslan, E ^{[1
]}

Efeoglu, I

机构：

[1] Ataturk Univ, Vocat Coll Erzurum, TR-25240 Erzurum, Turkey

[2] Ataturk Univ, Dept Mech Engn, TR-25240 Erzurum, Turkey

来源：

MATERIALS CHARACTERIZATION | 2004年 / 53卷 / 01期

关键词：

TiN; heat treatment; CFUBMS;

D O I：

10.1016/j.matchar.2004.07.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiN layers deposited by Closed Field Unbalanced Magnetron Sputtering (CFUBMS) on M2 tool steel were beat treated in an inert argon atmosphere at 700, 800 and 900 degreesC for 3 h. The coatings were analyzed by microhardness, XRD and scanning electron microscopy (SEM)-energy dispersive spectrometry (EDS). It was found that heat treatment at 700, 800 and 900 degreesC changed the mechanical properties, microstructure and composition of film. The golden yellow color of TiN films changed after heat treatment. The high values of the microhardness observed for asdeposited films decreased after heat treatment. The peak intensities of TiN decreased and the intensities of alpha-Fe increased with an increase of heat treatment temperature. The variation in chemical composition of films was determined as a function of the heat treatment. Microcracking of the surface morphology of films heat treated at 900 degreesC was observed. (C) 2004 Elsevier Inc. All rights reserved.

引用

页码：29 / 34

页数：6

共 11 条

[1] Annealing studies of TiN films deposited by plasma-assisted CVD [J].

Cheng, Z ;

Peng, HR ;

Xie, GW ;

Shi, YL .

SURFACE & COATINGS TECHNOLOGY, 2001, 138 (2-3) :237-241

[2]

EFEOGLU I, 1993, THESIS U SALFORD MAN

[3] The degradation of TiN films on Cu substrates at high temperature under controlled atmosphere [J].

Lu, FH ;

Feng, SP ;

Chen, HY ;

Li, JK .

THIN SOLID FILMS, 2000, 375 (1-2) :123-127

[4] Residual stress and its thermal relaxation in TiN films [J].

Matsue, T ;

Hanabusa, T ;

Ikeuchi, Y .

THIN SOLID FILMS, 1996, 281 (1-2) :344-347

[5] COMPARISON OF CUTTING PERFORMANCE OF ION-PLATED NBN, ZRN, TIN AND (TI,AL)N COATINGS [J].

MOLARIUS, JM ;

KORHONEN, AS ;

HARJU, E ;

LAPPALAINEN, R .

SURFACE & COATINGS TECHNOLOGY, 1987, 33 (1-4) :117-132

[6] Variation of color in titanium and zirconium nitride decorative thin films [J].

Niyomsoan, S ;

Grant, W ;

Olson, DL ;

Mishra, B .

THIN SOLID FILMS, 2002, 415 (1-2) :187-194

[7] TEMPERING EFFECTS IN ION-PLATED TIN FILMS - TEXTURE, RESIDUAL-STRESS, ADHESION AND COLOR [J].

PERRY, AJ .

THIN SOLID FILMS, 1987, 146 (02) :165-174

[8] INFLUENCE OF TEMPERATURE ON THE GROWTH OF TIN FILMS BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

SANDERS, FHM ;

VERSPUI, G .

THIN SOLID FILMS, 1988, 161 :L87-L90

[9]

TEER DG, 1996, Patent No. 969249879

[10] X-RAY-ANALYSIS OF HEAT-TREATED TITANIUM NITRIDE FILMS [J].

VALVODA, V ;

CERNY, R ;

KUZEL, R ;

DOBIASOVA, L ;

MUSIL, J ;

POULEK, V ;

VYSKOCIL, J .

THIN SOLID FILMS, 1989, 170 (02) :201-210

← 1 2 →