Piezoelectric sensors for investigations of microstructures

被引：20

作者：

Kielczynski, P ^{[1
]}

Pajewski, W ^{[1
]}

Szalewski, M ^{[1
]}

机构：

[1] Polish Acad Sci, Inst Fundamental Technol Res, PL-00049 Warsaw, Poland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 65卷 / 01期

关键词：

bimorphs; microstructures; piezoelectricity; surface investigations;

D O I：

10.1016/S0924-4247(98)80003-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In the paper the application of a piezoelectric bimorph as a sensor to investigate surfaces is considered. The voltage sensitivity and the stiffness of bimorphs with a central metal plate is analysed. This metal plate reinforces the bimorph structure. The derived formulae are used to calculate the parameters of the sensors, which consist of different combinations of metal and ceramic layers. The sensors have been calibrated using the quasistatic method. The experimental results are in good agreement with the calculations. Possible methods for increasing sensor sensitivity are also discussed. (C) 1998 Elsevier Science S.A.

引用

页码：13 / 18

页数：6

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