Analytical characterization of microlithographically fabricated iridium-based ultramicroelectrode arrays

被引:2
作者
Feeney, R [1 ]
Herdan, J [1 ]
Nolan, MA [1 ]
Tan, SH [1 ]
Tarasov, VV [1 ]
Kounaves, SP [1 ]
机构
[1] Tufts Univ, Dept Chem, Medford, MA 02155 USA
关键词
mercury-coated iridium ultramicroelectrode arrays; stripping voltammetry; microlithography;
D O I
10.1002/(SICI)1521-4109(199802)10:2<89::AID-ELAN89>3.3.CO;2-A
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The analytical performance of several mercury-coated iridium ultramicroelectrode arrays (IrUMEAs) was studied using square wave anodic stripping voltammetry (SWASV) for determination of cadmium in a pH 4.5 acetate buffer. The microlithographically fabricated IrUMEAs consisted of either 20 or 25 individual disk shaped UMEs, each 10 irm in diameter. The insulating layer utilized in the fabrication process was either silicon dioxide (5000 Angstrom) or silicon nitride (1500 Angstrom or 2500 Angstrom). Calibration plots demonstrated good linearity for cadmium from 0-100 ppb. Standard deviations, detection limits, and correlation coefficients were calculated to determine the stability and reproducibility of the IrUMEAs. Repetitive cycles of depositing and stripping Hg at the IrUMEA surface resulted in increased distortion and loss of the SWASV signal. Atomic force microscopy revealed a subtle transformation in the IrUMEA surfaces.
引用
收藏
页码:89 / 93
页数:5
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