Photothermal characterization of electrochemical etching processed n-type porous silicon

被引:59
作者
Calderon, A
Alvardo-Gil, JJ
Gurevich, YG
Cruz-Orea, A
Delgadillo, I
Vargas, H
Miranda, LCM
机构
[1] Inst Politecn Nacl, Ctr Invest & Estudios Avanzados, Dept Fis, Mexico City 07000, DF, Mexico
[2] Inst Politecn Nacl, Ctr Invest & Estudios Avanzados, Programa Multidisciplinario Ciencias Aplicadas &, Mexico City 07000, DF, Mexico
[3] Univ Estadual Norte Fluminense, Lab Ciencias Fis, BR-28015620 Campos Dos Goytacazes, RJ, Brazil
[4] Inst Nacl Pesquisas Espaciais, Lab Sensores & Mat, BR-12243010 Sao Jose Dos Campos, SP, Brazil
关键词
D O I
10.1103/PhysRevLett.79.5022
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The room temperature thermal diffusivity evolution of electrochemically formed porous silicon as a function of the etching time is investigated, The measurements were carried out using the open-cell photoacoustic technique; The experimental data were analyzed using a composite two-layer model. The results obtained strongly support the existing studies, indicating the presence of a high percentage of SiO2 in the composition of porous silicon material.
引用
收藏
页码:5022 / 5025
页数:4
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