Dielectric constants of amorphous hafnium aluminates: First-principles study

被引:41
作者
Momida, Hiroyoshi
Hamada, Tomoyuki
Takagi, Yoshiteru
Yamamoto, Takenori
Uda, Tsuyoshi
Ohno, Takahisa
机构
[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan
[2] Hitachi Ltd, Adv Res Lab, Kokubunji, Tokyo 1858601, Japan
[3] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
[4] AdvanceSoft Corp, Meguro Ku, Tokyo 1538904, Japan
来源
PHYSICAL REVIEW B | 2007年 / 75卷 / 19期
关键词
D O I
10.1103/PhysRevB.75.195105
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Amorphous model structures of hafnium aluminate having a Hf content of 0.2 (a-Hf0.2Al0.8O1.6), alumina (a-Al2O3), and hafnia (a-HfO2) are theoretically generated, and dielectric responses of the amorphous model structures are studied by the first-principles method. The models have corner, edge, and face shared AlOn (n=4-6) and HfOn (n=5-8) polyhedra, and the a-Hf0.2Al0.8O1.6 model structures are phase separated at the atomistic level, having Al2O3 and HfO2 domains. Calculated dielectric constants of the models increase with increasing Hf content, and the dielectric constant increase is dominated by the lattice polarization contribution to the dielectric constant. We found that low-frequency phonon modes having a frequency less than 200 cm(-1) largely contribute to the high lattice dielectric constant and that inter-HfO2 domain vibrations and vibration of atoms in distorted metal-oxygen polyhedra are dominant in the modes.
引用
收藏
页数:10
相关论文
共 58 条
[51]   Cooling-rate effects in amorphous silica: A computer-simulation study [J].
Vollmayr, K ;
Kob, W ;
Binder, K .
PHYSICAL REVIEW B, 1996, 54 (22) :15808-15827
[52]   High-κ gate dielectrics:: Current status and materials properties considerations [J].
Wilk, GD ;
Wallace, RM ;
Anthony, JM .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (10) :5243-5275
[53]   Improved film growth and hatband voltage control of ALD HfO2 and Hf-Al-O with n+ poly-Si gates using chemical oxides and optimized post-annealing [J].
Wilk, GD ;
Green, ML ;
Ho, MY ;
Busch, BW ;
Sorsch, TW ;
Klemens, FP ;
Brijs, B ;
van Dover, RB ;
Kornblit, A ;
Gustafsson, T ;
Garfunkel, E ;
Hillenius, S ;
Monroe, D ;
Kalavade, P ;
Hergenrother, JM .
2002 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, 2002, :88-89
[54]   First-principles study of dielectric properties of cerium oxide [J].
Yamamoto, T ;
Momida, H ;
Hamada, T ;
Uda, T ;
Ohno, T .
THIN SOLID FILMS, 2005, 486 (1-2) :136-140
[55]  
YAMASAKI T, 2002, P 2 INT C SEM TECHN, P262
[56]   Structural, electronic, and dielectric properties of amorphous ZrO2 from ab initio molecular dynamics -: art. no. 085107 [J].
Zhao, XY ;
Ceresoli, D ;
Vanderbilt, D .
PHYSICAL REVIEW B, 2005, 71 (08)
[57]  
Zhao XY, 2002, PHYS REV B, V65, DOI 10.1103/PhysRevB.65.233106
[58]   Effect of Al inclusion in HfO2 on the physical and electrical properties of the dielectrics [J].
Zhu, WJ ;
Tamagawa, T ;
Gibson, M ;
Furukawa, T ;
Ma, TP .
IEEE ELECTRON DEVICE LETTERS, 2002, 23 (11) :649-651