Detection of nanomechanical motion by evanescent light wave coupling

被引:34
作者
De Vlaminck, I.
Roels, J.
Taillaert, D.
Van Thourhout, D.
Baets, R.
Lagae, L.
Borghs, G.
机构
[1] IMEC, B-3001 Louvain, Belgium
[2] Univ Ghent, IMEC, INTEC, B-9000 Ghent, Belgium
[3] Katholieke Univ Leuven, ESAT, INSYS, Louvain, Belgium
关键词
D O I
10.1063/1.2746067
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors demonstrate a technique allowing sensitive nanomechanical motion detection based on the evanescent light wave coupling between two photonic nanowires. Any relative motion between the nanowires results in a change in light coupling, providing a means of registering motion. The in-plane vibrations of a 220 nmx400 nmx10 mu m nanomechanical resonator were recorded using this method. An analysis of the sensitivity reveals the potential of this integrated technique to provide fast and sensitive motion detection. (c) 2007 American Institute of Physics.
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页数:3
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