Femtosecond laser fabrication of nanostructures in silica glass

被引：63

作者：

Taylor, RS

Hnatovsky, C

Simova, E

Rayner, DM

Bhardwaj, VR

Corkum, PB

机构：

[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada

[2] Natl Res Council Canada, Steacie Inst Mol Sci, Ottawa, ON K1A 0R6, Canada

来源：

OPTICS LETTERS | 2003年 / 28卷 / 12期

关键词：

D O I：

10.1364/OL.28.001043

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A femtosecond laser beam focused inside fused silica and other glasses can modify the refractive index of the glass. Chemical etching and atomic-force microscope studies show that the modified region can have a sharp-tipped cone-shaped structure with a tip diameter as small as 100 nm. Placing the structure near the bottom surface of a silica glass sample and applying a selective chemical etch to the bottom surface produces clean, circular, submicrometer-diameter holes. Holes spaced as close to one another as 1.4 mum are demonstrated. (C) 2003 Optical Society of America.

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页码：1043 / 1045

页数：3

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