Optical multilayer films based on an amorphous fluoropolymer

被引:13
作者
Chow, R
Loomis, GE
Ward, RL
机构
[1] Lawrence Livermore Natl. Laboratory, Livermore
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 01期
关键词
D O I
10.1116/1.579881
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Multilayered coatings were made by physical vapor deposition (PVD) of a perfluorinated amorphous polymer, Teflon AF2400, and with other optical materials. A high reflector for 1064 nm light was made with ZnS and AF2400. An all-organic 1064 nm reflector was made from AF2400 and polyethylene. Oxide (HfO2 and SiO2) compatibility with AF2400 was also tested. The multilayer morphologies were influenced by coating stress and unintentional temperature rises from the PVD process. Analysis by liquid nuclear magnetic resonance of the thin films showed slight compositional variations between the coating and starting materials of perfluorinated amorphous polymers.
引用
收藏
页码:63 / 68
页数:6
相关论文
共 20 条
[1]   DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION [J].
BLANCHET, GB .
APPLIED PHYSICS LETTERS, 1993, 62 (05) :479-481
[2]  
CHOW R, 1994, MATER RES SOC SYMP P, V328, P731
[3]  
CHOW R, 1994, P SOC PHOTO-OPT INS, V1848, P262
[4]  
GRIESER J, 1991, P SOC PHOTO-OPT INS, V1330, P111
[5]   APPLICATIONS OF DOPING AND DEDOPING OF TEFLON AF FILMS IN MICROFABRICATION USING KRF AND ARF EXCIMER LASERS [J].
HIRAOKA, H ;
LAZARE, S .
APPLIED SURFACE SCIENCE, 1990, 46 (1-4) :342-347
[6]  
LEPLAN H, 1994, P SOC PHOTO-OPT INS, V2253, P1263
[7]   OPTICAL CHARACTERISTICS OF TEFLON AF(R) FLUOROPLASTIC MATERIALS [J].
LOWRY, JH ;
MENDLOWITZ, JS ;
SUBRAMANIAN, NS .
OPTICAL ENGINEERING, 1992, 31 (09) :1982-1985
[8]  
MORGAN AJ, 1990, P SOC PHOTO-OPT INS, V1438, P47
[9]   DEPOSITION OF AMORPHOUS FLUOROPOLYMER THIN-FILMS BY THERMOLYSIS OF TEFLON AMORPHOUS FLUOROPOLYMER [J].
NASON, TC ;
MOORE, JA ;
LU, TM .
APPLIED PHYSICS LETTERS, 1992, 60 (15) :1866-1868
[10]   ION-BEAM SPUTTERING DEPOSITION OF FLUOROPOLYMER THIN-FILMS [J].
QUARANTA, F ;
VALENTINI, A ;
FAVIA, P ;
LAMENDOLA, R ;
DAGOSTINO, R .
APPLIED PHYSICS LETTERS, 1993, 63 (01) :10-11