Properties of (Nb1-xTax)zO5 solid solutions and (Nb1-xTax)2O5-ZrO2 nanolaminates grown by atomic layer epitaxy

被引：37

作者：

Kukli, K ^{[1
]}

Ritala, M ^{[1
]}

Leskela, M ^{[1
]}

机构：

[1] Univ Helsinki, Dept Chem, POB 55, FIN-00014 Helsinki, Finland

来源：

NANOSTRUCTURED MATERIALS | 1997年 / 8卷 / 07期

关键词：

D O I：

10.1016/S0965-9773(98)00003-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

(Nb1-xTax)(2)O-5 solid solution films and (Nb1-xTax)(2)O-5-ZrO2 nanolaminates have been deposited by Atomic Layer Epitaxy. Amorphous (Nb1-xTax)(2)O-5 films were obtained by sequential pulsing of tantalum and niobium ethoxide and water. The composition of the films was checked by Energy Dispersive X-ray Spectroscopy (Nb1-xTax)(2)O-5 films exhibited 1.6-4 times higher permittivity than that of Ta2O5 films. Leakage currents through the (Nb1-xTax)(2)O-5 films were reduced drastically by adding intermediate ZrO2 layers with thickness of 5-10 nm, i.e. by constructing nanolaminate structures. The ZrO2 interlayers contained nanosize tetragonal ZrO2 crystallites. (C) 1998 Acta Metallurgica Inc.

引用

页码：785 / 793

页数：9

共 32 条

[1] Thermodynamics of tetragonal zirconia formation in a nanolaminate film [J].