共 14 条
[1]
Preparation of SrBi2Ta2O9 film at low temperatures and fabrication of a metal/ferroelectric/insulator/semiconductor field effect transistor using Al/SrBi2Ta2O9/CeO2/Si(100) structures
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (9B)
:5908-5911
[4]
ISHIWARA H, 1999, P INT S FUT INT INT, P249
[5]
KATOH Y, 1996, S VLSI, P56
[6]
Kawasaki T, 1998, IEICE T ELECTRON, VE81C, P584
[7]
Characteristics of metal/ferroelectric/insulator/semiconductor field effect transistors using a Pt/SrBi2Ta2O9/Y2O3/Si structure
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
1998, 37 (3B)
:1107-1109