Modeling electric-field-sensitive scanning probe measurements for a tip of arbitrary shape

被引：9

作者：

Kujanishvili, I

Chakraborty, S

Maasilta, IJ

Tessmer, SH

Melloch, MR

机构：

[1] Michigan State Univ, Dept Phys & Astron, E Lansing, MI 48824 USA

[2] Purdue Univ, Dept Elect Engn, W Lafayette, IN 47907 USA

来源：

ULTRAMICROSCOPY | 2004年 / 102卷 / 01期

基金：

美国国家科学基金会;

关键词：

microscopic methods; specifically for solid interfaces and multilayers; cryomicroscopic methods;

D O I：

10.1016/j.ultramic.2004.07.004

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We present a numerical method to model electric-field-sensitive scanning probe microscopy measurements which allows for a tip of arbitrary shape and invokes image charges to exactly account for a sample dielectric overlayer. The method is applied to calculate the spatial resolution of a subsurface charge accumulation imaging system, achieving reasonable agreement with experiment. (C) 2004 Elsevier B.V. All rights reserved.

引用

收藏

页码：7 / 12

页数：6

相关论文

共 17 条

[1] LATERAL DOPANT PROFILING IN SEMICONDUCTORS BY FORCE MICROSCOPY USING CAPACITIVE DETECTION [J].

ABRAHAM, DW ;

WILLIAMS, C ;

SLINKMAN, J ;

WICKRAMASINGHE, HK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :703-706

[2]

BECKER AA, 1992, BOUNDRY ELEMENT METH

[3] Electrostatic forces acting on the tip in atomic force microscopy: Modelization and comparison with analytic expressions [J].

Belaidi, S ;

Girard, P ;

Leveque, G .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (03) :1023-1030

[4] Imaging a two-dimensional electron system with a scanning charged probe [J].

Chakraborty, S ;

Maasilta, IJ ;

Tessmer, SH ;

Melloch, MR .

PHYSICAL REVIEW B, 2004, 69 (07)

[5] Effect of a charged scanned probe microscope tip on a subsurface electron gas [J].

Eriksson, MA ;

Beck, RG ;

Topinka, MA ;

Katine, JA ;

Westervelt, RM ;

Campman, KL ;

Gossard, AC .

SUPERLATTICES AND MICROSTRUCTURES, 1996, 20 (04) :435-440

[6] Cryogenic scanning probe characterization of semiconductor nanostructures [J].

Eriksson, MA ;

Beck, RG ;

Topinka, M ;

Katine, JA ;

Westervelt, RM ;

Campman, KL ;

Gossard, AC .

APPLIED PHYSICS LETTERS, 1996, 69 (05) :671-673

[7] Topographic mapping of the quantum hall liquid using a few-electron bubble [J].

Finkelstein, G ;

Glicofridis, PI ;

Ashoori, RC ;

Shayegan, M .

SCIENCE, 2000, 289 (5476) :90-94

[8]

HUANG Y, 1995, APPL PHYS LETT, V66, P334

[9]

JACKSON JD, 1975, CLASSICAL ELECTRODYN, P48

[10] HIGH-RESOLUTION CAPACITANCE MEASUREMENT AND POTENTIOMETRY BY FORCE MICROSCOPY [J].

MARTIN, Y ;

ABRAHAM, DW ;

WICKRAMASINGHE, HK .

APPLIED PHYSICS LETTERS, 1988, 52 (13) :1103-1105