Observed effects of a changing step-edge density on thin-film growth dynamics

被引:24
作者
Fleet, A [1 ]
Dale, D
Suzuki, Y
Brock, JD
机构
[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
[2] Cornell Univ, Cornell Ctr Mat Res, Ithaca, NY 14853 USA
[3] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
[4] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
D O I
10.1103/PhysRevLett.94.036102
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We grew SrTiO3 on SrTiO3(001) by pulsed laser deposition, while observing x-ray diffraction at the (00 1/2) position. The drop DeltaI in the x-ray intensity following a laser pulse contains information about plume-surface interactions. Kinematic theory predicts DeltaI/I=-4sigma(1-sigma), so that DeltaI/I depends only on the amount of deposited material sigma. In contrast, we observed experimentally that \DeltaI/I|<4sigma(1-sigma) and that DeltaI/I depends on the phase of x-ray growth oscillations. The combined results suggest a fast smoothing mechanism that depends on surface step-edge density.
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页数:4
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