Tungsten-doped vanadium oxides prepared by direct liquid injection MOCVD

被引:45
作者
Vernardou, Dimitra [1 ]
Pemble, Martyn E. [1 ]
Sheel, David W. [1 ]
机构
[1] Univ Salford, Inst Mat Res, Salford M5 4WT, Lancs, England
关键词
atmospheric-pressure direct liquid injection MOCVD; thermochromic properties; tungsten(VI) ethoxide; vanadyl(IV) acetyl acetonate; CHEMICAL-VAPOR-DEPOSITION; INTELLIGENT WINDOW COATINGS; VO2; THIN-FILMS; TRANSITION-TEMPERATURE; RAMAN-SCATTERING; DIOXIDE; ACETYLACETONATE;
D O I
10.1002/cvde.200606527
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
This paper examines the effect of doping on vanadium(IV) oxide (VO2 (M)) coatings on glass, using atmospheric-pressure, direct liquid injection metal-organic (DLI-MO)CVD, which potentially may find application as part of smart glazing units. It is found that tungsten-doped VO2 (M) deposited on commercial SiO2-precoated glass using a 0.1 M solution of vanadyl(IV) acetylacetonate (VO(acac)(2)) and tungsten (VI) ethoxide (W(OC2H5)(5)) in methanol shows a reduction in thermochromic transition temperature (T-c) from 60 degrees C in VO2 (M) to 35 degrees C in V0.98W0.02O2. This finding is discussed in terms of various atomic percentages of tungsten and oxygen flow rates. The crystallinity, composition, morphology, optical properties, uniformity, and oxidation phase of the films are evaluated by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), scanning electron microscopy (SEM), IR reflectance-transmittance, and Raman spectroscopy, respectively. The relationship between dopant concentration and T-c in the most applicable range for solar window coatings is refined by formation of a single-phase film and precise determination of these parameters.
引用
收藏
页码:158 / 162
页数:5
相关论文
共 25 条
[1]   Optical switching in VO2 thin films [J].
Béteille, F ;
Livage, J .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1998, 13 (1-3) :915-921
[2]   W- and F-doped VO2 films studied by photoelectron spectrometry [J].
Burkhardt, W ;
Christmann, T ;
Meyer, BK ;
Niessner, W ;
Schalch, D ;
Scharmann, A .
THIN SOLID FILMS, 1999, 345 (02) :229-235
[3]   Optical switching of Au-doped VO2 sol-gel films [J].
Cavanna, E ;
Segaud, JP ;
Livage, J .
MATERIALS RESEARCH BULLETIN, 1999, 34 (02) :167-177
[4]  
CESARI C, 1998, KEY ENG MATER, V127, P155
[5]   UNDOPED AND DOPED VO2 FILMS GROWN FROM VO(OC3H7)3 [J].
GREENBERG, CB .
THIN SOLID FILMS, 1983, 110 (01) :73-82
[6]   Molybdenum-doped vanadium dioxide coatings on glass produced by the aqueous sol-gel method [J].
Hanlon, TJ ;
Coath, JA ;
Richardson, MA .
THIN SOLID FILMS, 2003, 436 (02) :269-272
[7]   RELATIONSHIP BETWEEN TRANSITION-TEMPERATURE AND X IN V1-XWXO2 FILMS DEPOSITED BY DUAL-TARGET MAGNETRON SPUTTERING [J].
JIN, P ;
TANEMURA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (5A) :2459-2460
[8]   Tungsten doping into vanadium dioxide thermochromic films by high-energy ion implantation and thermal annealing [J].
Jin, P ;
Nakao, S ;
Tanemura, S .
THIN SOLID FILMS, 1998, 324 (1-2) :151-158
[9]  
Jones AC, 1998, CHEM VAPOR DEPOS, V4, P46, DOI 10.1002/(SICI)1521-3862(199803)04:02<46::AID-CVDE46>3.0.CO
[10]  
2-1