Fabrication of low loss Ge33As12Se55 (AMTIR-1) planar waveguides

被引：42

作者：

Choi, Duk-Yong ^{[1
]}

Madden, Steve ^{[1
]}

Rode, Andrei ^{[1
]}

Wang, Rongping ^{[1
]}

Luther-Davies, Barry ^{[1
]}

机构：

[1] Australian Natl Univ, Ctr Ultra High Bandwidth Devices Opt Syst, Laser Phys Ctr, Res Sch Phys Sci & Engn, Canberra, ACT 0200, Australia

来源：

APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 01期

基金：

澳大利亚研究理事会;

关键词：

D O I：

10.1063/1.2754360

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors describe the fabrication of low loss Ge33As12Se55 rib waveguides. Pulsed laser deposition was used to obtain high quality, dense films with the same stoichiometry as the bulk glass, while standard semiconductor processing was used to pattern the waveguides. They obtained rib waveguides of 3, 4, and 5 mu m wide with propagation losses (0.3 dB/cm at 1550 nm) more than ten times lower than previously reported for this material. (c) 2007 American Institute of Physics.

引用

页数：3

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