Silver catalyzed ultrathin silicon nanowires grown by low-temperature chemical-vapor-deposition

被引:42
作者
Wittemann, Joerg V. [1 ]
Muenchgesang, Wolfram [1 ]
Senz, Stephan [1 ]
Schmidt, Volker [1 ]
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle, Germany
关键词
LIQUID-SOLID MECHANISM; CRYSTAL GROWTH; WHISKERS;
D O I
10.1063/1.3393601
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work we demonstrate the synthesis of monocrystalline silicon nanowire using silver particles as catalysts at temperatures of less than 500 degrees C by means of ultrahigh vacuum chemical vapor deposition. The nanowires were grown epitaxially on silicon substrates and had diameters of about 10 nm. We furthermore show that the silver remnants can be wet chemically removed with potassium ferricyanide and sodium thiosulfate. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3393601]
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页数:3
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