Synthesis of the ferroelectric solid solution, Pb(Zr1-xTix)O3 on a single substrate using a modified molecular beam epitaxy technique

被引：19

作者：

Anderson, P. S.

Guerin, S.

Hayden, B. E.

Khan, M. A.

Bell, A. J.

Han, Y.

Pasha, M.

Whittle, K. R.

Reaney, I. M.

机构：

[1] Univ Southampton, Ilika Technol Ltd, Southampton SO16 7NS, Hants, England

[2] Univ Southampton, Sch Chem, Southampton SO17 1BJ, Hants, England

[3] Univ Leeds, Sch Proc Environm & Mat Engn, Mat Res Inst, Leeds LS2 9JT, W Yorkshire, England

[4] Univ Sheffield, Dept Mat Engn, Sheffield S1 3JD, S Yorkshire, England

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 20期

关键词：

D O I：

10.1063/1.2738191

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High-throughput synthesis of the ferroelectric solid solution Pb(Zr1-xTix)O-3 (PZT) on single Pt/Ti/SiO2/Si substrates was demonstrated using a modified molecular beam epitaxy (MBE) system. The PZT films exhibited a phase transition from rhombohehdral to tetragonal symmetry as a function of Zr:Ti ratio, across the substrate diagonal. This was consistent with the presence of a morphotropic phase boundary at Zr:Ti ratio of 0.64:0.36, different from the value of 0.53:0.47 observed for bulk ceramics. All points on the films exhibited ferroelectric hysteresis. Results demonstrate the feasibility of high-throughput MBE for deposition of complex ferroelectric oxides, and pave the way for further materials discovery. (C) 2007 American Institute of Physics.

引用

页数：3

共 13 条

[1] Orientation control of textured PZT thin films sputtered on silicon substrate with TiOx seeding [J].