Analysis of metal features produced by uv irradiation of organometallic films

被引：7

作者：

Berry, GJ

Cairns, JA

Davidson, MR

Fan, YC

Fitzgerald, AG ^{[1
]}

Thomson, J

Shaikh, W

机构：

[1] Univ Dundee, Dept Appl Phys & Elect & Mfg Engn, Dundee DD1 4HN, Scotland

[2] Univ Dundee, Dept Chem, Dundee DD1 4HN, Scotland

[3] Rutherford Appleton Lab, Cent Laser Facil, Didcot OX11 0QX, Oxon, England

来源：

APPLIED SURFACE SCIENCE | 2000年 / 162卷

基金：

英国工程与自然科学研究理事会;

关键词：

electron microscopy; atomic force microscopy; metallisation; photolysis;

D O I：

10.1016/S0169-4332(00)00240-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Gold and platinum patterns have been produced by UV-induced decomposition of a range of organometallic films. A nanosecond-pulsed excimer laser operating at 193 or 248 nm was used as the source of illumination. The metal thereby formed has been extensively studied using a wide range of analytical techniques. These include scanning and transmission electron microscopy (SEM, TEM), atomic force microscopy (AFM), and energy dispersive X-ray microanalysis (EDX). This analysis has demonstrated that the metal is polycrystalline with a grain size of typically 10 nm. This technique for producing high-resolution metal patterns has wide ranging applications, especially in microelectronics. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：504 / 507

页数：4

共 10 条

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