ULTRAVIOLET-LIGHT INDUCED DEPOSITION OF GOLD-FILMS

被引：13

作者：

YE, YT

HUNSPERGER, RG

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 25期

关键词：

D O I：

10.1063/1.98971

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2136 / 2138

页数：3

共 11 条

[1]

ARNONE C, 1986, APPL PHYS LETT, V48, P101

[2] LASER SELECTIVE DEPOSITION OF GAAS ON SI [J].

BEDAIR, SM ;

WHISNANT, JK ;

KARAM, NH ;

TISCHLER, MA ;

KATSUYAMA, T .

APPLIED PHYSICS LETTERS, 1986, 48 (02) :174-176

[3] PHOTOLYSIS OF FE(CO)5 ADSORBED ON GAAS AT 77-K [J].

BOTTKA, N ;

WALSH, PJ ;

DALBEY, RZ .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) :1104-1109

[4]

CANTERFORD JH, 1968, HALIDES 2ND 3RD ROW, P37

[5] SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J].

DEUTSCH, TF ;

GEIS, MW .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :7201-7204

[6] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) :1233-1243

[7] LASER-INITIATED MICROCHEMISTRY - DYNAMIC PROBES OF METALLOPOLYMER THIN-FILM DECOMPOSITION [J].

FISANICK, GJ ;

HOPKINS, JB ;

GROSS, ME ;

FENNELL, MD ;

SCHNOES, KJ .

APPLIED PHYSICS LETTERS, 1985, 46 (12) :1184-1186

[8] LASER-INITIATED MICROCHEMISTRY IN THIN-FILMS - DEVELOPMENT OF NEW TYPES OF PERIODIC STRUCTURE [J].

FISANICK, GJ ;

GROSS, ME ;

HOPKINS, JB ;

FENNELL, MD ;

SCHNOES, KJ ;

KATZIR, A .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1139-1142

[9] LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS [J].

GROSS, ME ;

FISANICK, GJ ;

GALLAGHER, PK ;

SCHNOES, KJ ;

FENNELL, MD .

APPLIED PHYSICS LETTERS, 1985, 47 (09) :923-925

[10] THE EFFECT OF PHYSICAL ADSORPTION ON THE ABSOLUTE DECOMPOSITION RATES OF CRYSTALLINE AMMONIUM CHLORIDE AND CUPRIC SULFATE TRIHYDRATE [J].

SCHULTZ, RD ;

DEKKER, AO .

JOURNAL OF PHYSICAL CHEMISTRY, 1956, 60 (07) :1095-1100

← 1 2 →