Dynamic behavior of amplitude detection Kelvin force microscopy in ultrahigh vacuum

被引：9

作者：

Diesinger, H. ^{[1
]}

Deresmes, D. ^{[1
]}

Nys, J. -P. ^{[1
]}

Melin, T. ^{[1
]}

机构：

[1] CNRS, IEMN, UMR 8520, F-59652 Villeneuve Dascq, France

来源：

ULTRAMICROSCOPY | 2010年 / 110卷 / 02期

关键词：

Non-contact atomic force microscopy; (AFM); Kelvin force microscopy; SENSITIVITY; CANTILEVER;

D O I：

10.1016/j.ultramic.2009.10.016

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The acquisition rate of all scanning probe imaging techniques with feedback control is limited by the dynamic response of the control loops. Performance criteria are the control loop bandwidth and the output signal noise power spectral density. Depending on the acceptable noise level, it may be necessary to reduce the sampling frequency below the bandwidth of the control loop. In this work, the frequency response of a vacuum Kelvin force microscope with amplitude detection (AM-KFM) using a digital signal processing (DSP) controller is characterized and optimized. Then, the main noise source and its impact on the output signal is identified. A discussion follows on how the system design can be optimized with respect to output noise. Furthermore, the interaction between Kelvin and distance control loop is studied, confirming the beneficial effect of KFM on topography artefact reduction in the frequency domain. The experimental procedure described here can be generalized to other systems and allows to locate the performance limitations. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：162 / 169

页数：8

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