Epitaxial Graphenes on Silicon Carbide

被引:160
作者
First, Phillip N.
de Heer, Walt A.
Seyller, Thomas
Berger, Claire
Stroscio, Joseph A.
Moon, Jeong-Sun
机构
基金
美国国家科学基金会;
关键词
SCANNING-TUNNELING-MICROSCOPY; ELECTRONIC-PROPERTIES; ENERGY BANDGAP; BERRYS PHASE; SI-FACE; GRAPHITE; STATE; GRAPHITIZATION; SPECTROSCOPY; 6H-SIC(0001);
D O I
10.1557/mrs2010.552
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This article reviews the materials science of graphene grown epitaxially on the hexagonal basal planes of SiC crystals and progress toward the deterministic manufacture of graphene devices. We show that the growth of epitaxial graphene on Si-terminated SiC(0001) differs from growth on the C-terminated SiC(00071) surface, resulting in, respectively, strong and weak coupling to the substrate and to successive graphene layers. Mono layer epitaxial graphene on either surface displays the expected electronic structure and transport characteristics of graphene, but the non-graphitic stacking of multilayer graphene on SiC(0001) determines an electronic structure much different from that of graphitic multilayers on SiC(0001). This materials system is rich in subtleties, and graphene grown on the two polar faces of SiC differs in important ways, but all of the salient features of ideal graphene are found in these epitaxial graphenes, and wafer-scale fabrication of multi-GHz devices already has been achieved.
引用
收藏
页码:296 / 305
页数:10
相关论文
共 107 条
[1]   Berry's phase and absence of back scattering in carbon nanotubes [J].
Ando, T ;
Nakanishi, T ;
Saito, R .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1998, 67 (08) :2857-2862
[2]   Chemical Modification of Epitaxial Graphene: Spontaneous Grafting of Aryl Groups [J].
Bekyarova, Elena ;
Itkis, Mikhail E. ;
Ramesh, Palanisamy ;
Berger, Claire ;
Sprinkle, Michael ;
de Heer, Walt A. ;
Haddon, Robert C. .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2009, 131 (04) :1336-+
[3]   Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics [J].
Berger, C ;
Song, ZM ;
Li, TB ;
Li, XB ;
Ogbazghi, AY ;
Feng, R ;
Dai, ZT ;
Marchenkov, AN ;
Conrad, EH ;
First, PN ;
de Heer, WA .
JOURNAL OF PHYSICAL CHEMISTRY B, 2004, 108 (52) :19912-19916
[4]   Electronic confinement and coherence in patterned epitaxial graphene [J].
Berger, Claire ;
Song, Zhimin ;
Li, Xuebin ;
Wu, Xiaosong ;
Brown, Nate ;
Naud, Cecile ;
Mayou, Didier ;
Li, Tianbo ;
Hass, Joanna ;
Marchenkov, Atexei N. ;
Conrad, Edward H. ;
First, Phillip N. ;
de Heer, Wait A. .
SCIENCE, 2006, 312 (5777) :1191-1196
[5]   Insights into few-layer epitaxial graphene growth on 4H-SiC(000(1)over-bar substrates from STM studies [J].
Biedermann, Laura B. ;
Bolen, Michael L. ;
Capano, Michael A. ;
Zemlyanov, Dmitry ;
Reifenberger, Ronald G. .
PHYSICAL REVIEW B, 2009, 79 (12)
[6]   Ultrahigh electron mobility in suspended graphene [J].
Bolotin, K. I. ;
Sikes, K. J. ;
Jiang, Z. ;
Klima, M. ;
Fudenberg, G. ;
Hone, J. ;
Kim, P. ;
Stormer, H. L. .
SOLID STATE COMMUNICATIONS, 2008, 146 (9-10) :351-355
[7]   Symmetry breaking in few layer graphene films [J].
Bostwick, Aaron ;
Ohta, Taisuke ;
McChesney, Jessica L. ;
Emtsev, Konstantin V. ;
Seyller, Thomas ;
Horn, Karsten ;
Rotenberg, Eli .
NEW JOURNAL OF PHYSICS, 2007, 9
[8]   Quasiparticle dynamics in graphene [J].
Bostwick, Aaron ;
Ohta, Taisuke ;
Seyller, Thomas ;
Horn, Karsten ;
Rotenberg, Eli .
NATURE PHYSICS, 2007, 3 (01) :36-40
[9]   SiC for applications in high-power electronics [J].
Brandt, CD ;
Clarke, RC ;
Siergiej, RR ;
Casady, JB ;
Sriram, S ;
Agarwal, AK ;
Morse, AW .
SIC MATERIALS AND DEVICES, 1998, 52 :195-236
[10]   SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF CUBIC BETA-SIC(111) SURFACES [J].
CHANG, CS ;
TSONG, IST ;
WANG, YC ;
DAVIS, RF .
SURFACE SCIENCE, 1991, 256 (03) :354-360