Optical properties of Bi3.25La0.75Ti3O12 thin films using spectroscopic ellipsometry

被引:36
作者
Hu, ZG [1 ]
Wang, GS [1 ]
Huang, ZM [1 ]
Chu, JH [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China
关键词
D O I
10.1063/1.1559003
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using spectroscopic ellipsometry, the optical properties of the Bi3.25La0.75Ti3O12 (BLT) thin films with different film thicknesses on platinized silicon substrates prepared by chemical solution methods have been investigated in the 400-1700 nm wavelength range. By fitting the measured ellipsometric parameter (Psi and Delta) data with a multilayer model system and the classical dispersion relation for the BLT thin films, the optical constants and thicknesses of the thin films have been obtained. Meanwhile, some degree of inhomogeneity (in the form of low density layers or surface roughness) has been found in the BLT thin films except for the thinnest film, which was homogeneous throughout its thickness. The multilayer model system became very complicated with increasing thickness. It indicated that the microstructure of the BLT thin films varied with increasing thickness. The refractive index n of the BLT thin films increases with increasing thickness, and on the contrary, the extinction coefficient k decreases with increasing thickness. The dispersion of the refractive index can be well explained by a single-term Sellmeier relation. (C) 2003 American Institute of Physics.
引用
收藏
页码:3811 / 3815
页数:5
相关论文
共 19 条
[1]  
Azzam R., 1977, ELLIPSOMETRY POLARIZ
[2]   Fatigue-free behavior of highly oriented Bi3.25La0.75Ti3O12 thin films grown on Pt/Ti/SiO2/Si(100) by metalorganic solution decomposition [J].
Chon, U ;
Yi, GC ;
Jang, HM .
APPLIED PHYSICS LETTERS, 2001, 78 (05) :658-660
[3]   OXYGEN-OCTAHEDRA FERROELECTRICS .I. THEORY OF ELECTRO-OPTICAL AND NONLINEAR OPTICAL EFFECTS [J].
DIDOMENICO, M ;
WEMPLE, SH .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (02) :720-+
[4]  
Edwards D.F., 1985, Handbook of optical constants of solids
[5]   Synthesis and optical properties of highly c-axis oriented Bi4Ti3O12 thin films by sol-gel processing [J].
Gu, HS ;
Bao, DH ;
Wang, SM ;
Gao, DF ;
Kuang, AX ;
Li, XJ .
THIN SOLID FILMS, 1996, 283 (1-2) :81-83
[6]   STRUCTURAL AND ELECTROOPTIC PROPERTIES OF LASER ABLATED BI4TI3O12 THIN-FILMS ON SRTIO3(100) AND SRTIO3(110) [J].
JO, W ;
YI, GC ;
NOH, TW ;
KO, DK ;
CHO, YS ;
KWUN, SI .
APPLIED PHYSICS LETTERS, 1992, 61 (13) :1516-1518
[7]   STRUCTURAL AND OPTICAL-PROPERTIES OF FERROELECTRIC BI4TI3O12 THIN-FILMS BY SOL-GEL TECHNIQUE [J].
JOSHI, PC ;
MANSINGH, A ;
KAMALASANAN, MN ;
CHANDRA, S .
APPLIED PHYSICS LETTERS, 1991, 59 (19) :2389-2390
[8]   Ferroelectric properties of alkoxy-derived CaBi4Ti4O15 thin films on Pt-passivated Si [J].
Kato, K ;
Suzuki, K ;
Nishizawa, K ;
Miki, T .
APPLIED PHYSICS LETTERS, 2001, 78 (08) :1119-1121
[9]   Device physics - Memories are made of ... [J].
Kingon, A .
NATURE, 1999, 401 (6754) :658-659
[10]   Investigations on the optical properties of sol-gel derived lanthanum doped lead titanate thin films [J].
Majumder, SB ;
Jain, M ;
Katiyar, RS .
THIN SOLID FILMS, 2002, 402 (1-2) :90-98